Shown is the new LTE (Light Tight Enclosure) with VersaTile^TM system in a Celadon Modular Adapter^TM. The red knobs shown allow easy planarization to the sub 10 micron level for the probe card. The probe card is surrounded by a light tight enclosure (LTE) which guarantees maximum low-level current monitoring performance. Removable side panels of the octagon LTE allow for customization of the cabling connection. In the above photos, two 25-pin AMP connectors allow quick connect and disconnect of the low leakage driven guard channels. A removable lid shown in the middle photo completes the light tight design.

• Have you ever tried to probe a wafer only to have light effect the measurements and repeatability?
• Have you ever had measurements and reliability data changed day to day due to humidity?
• Have you ever moved a cable in a way such that the probe card was damaged or moved on the wafer and damaged it?
• Have you ever had the need to change the sex of a cable on an interface box while keeping cable length to a minimum?
• Do you hneed a way to keep cables from probes to interace kept to a minimum length?
• Do you need a way to keep the gas such as nitrogen on your pads to keep the wafer pads from oxidizing
• Have you ever had stray fields from motors, lights, power converters, test instruments cause strange unrepeatable measurements due to noise and field problems?
• Do you have problems with capacitance measurement repeatability when using probe cards?

These are the problems that this product solves in an Elegant machined metal enclosure with cover and replaceable side walls.

• Available for leading analytical and autoprober manufacturers
• Provide Light Tight E/M Shielding for wafer from the platen to Microscope area.
• Provide Enivronmental Enclosure so Nitrogen or Dry Air can be kept in probing environment while Multi-Site probing takes place.
• Provide Enclosure for Positive Pressure Nitrogen Environment to prevent wafer oxidation at temperature.
• Bring out cables from probe card to interface panel through shield while providing solid cable anchor and strain relief system.