MiniTile™ & WedgeTile™ Probe Cards

Each probe is designed for wide temperature ranges and so the probe expansion characteristics are closely matched to the wafer’s expansion characteristics. This allows the user to take a fast measurement while a system is in a settling or thermal stabilization mode and helps compensate for wafer expansion.


  • Rigid ceramic and metal chassis
  • Integrated cable strain reliefs
  • -65°C to 300°C operating temperature ranges
  • 1 to 25 pins per site
  • Available in regular low leakage (5 femto amps per volt)
  • AttoFast™ with guarded tips for 2 femto amp per volt settling time
  • High accuracy capacitance measurements
  • Low probe to probe capacitance for high accuracy CV measurements and for device characterization and modeling

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