MiniTile™ & WedgeTile™ Probe Cards

Each probe is designed for wide temperature ranges and so the probe expansion characteristics are closely matched to the wafer’s expansion characteristics. This allows the user to take a fast measurement while a system is in a settling or thermal stabilization mode and helps compensate for wafer expansion.

• Rigid ceramic and metal chassis
• Integrated cable strain reliefs
• -65°C to 300°C operating temperature ranges
• 1 to 25 pins per site
• Available in regular low leakage (5 femto amps per volt)
• AttoFast™ with guarded tips for 2 femto amp per volt settling time
• High accuracy capacitance measurements
• Low probe to probe capacitance for high accuracy CV measurements and for device characterization and modeling