Celadon Systems, Inc.

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VersaPlate™

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  • Learn more about VersAdjustTM
  • Do you need for more long term data from one wafer and find you do not have enough probers, evaluation wafers and surrounding test equipment?
  • Do you need your data faster?
  • Have you taken enough data to be statistically meaningful?
  • Do your tests require measurements over a long period of time and the probes contact the wafer continuously on just one die location or test structure?
  • Are you in the middle of a new process qualification which has the same test pattern but different spacing between test structures?
  • Do you need to go from single site on a probe arm to Multi-Site with the same tiles?
  • Do you need spare position capability for your tests?
  • Do you want to use the same probes for single site and Multi-Site measurements?
  • Do you throw your Multi-Site probe cards away as your die to die pitch changes?

If you answer is yes to these to some of these questions, you may want to consider a VersaPlateTM. It allows for the re-use of a VersaTileTM but for wafer probing applications. It allows for parallel test of a wafer.

  • It can be used to test at high temperature, many sites, low current test and for long test times.
  • When your finished with your tests, VersaTilesTM can be removed and either mounted on a new VersaPlateTM with new test structure, new single site probe card application or be used for positioner mounted applications.
  • Each VersaPlateTM is designed for your application. Depending on pad size, operating temperature and maximum distance between points to be probe will depend on how much of an alignment will be needed during tile remounts.
  • A VersaPlateTM can have up to 9 tiles on 200 mm Celadon Modular AdapterTM and up to 17 tiles on a 300 mm Celadon Modular AdapterTM.
  • VersaTilesTM can be field replaced in individual positions. Field replacement works best on pad sizes that are within the design tolerance. For small pads sizes, a precision factory alignment is suggested.
  • Product options include the use of thermally stable substrate for probing pads that are either small or over large temperature ranges.
Product requires Probe station with either upward looking microscope or microscope with suitable x-y travel to view sites being probed for alignment process.