Celadon Systems, Inc.

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T200 Series

200 Millimeter Celadon Ceramic Button Tile™ Multi-Site Probe Card

T200.jpg
  • Optimized for Multi-Site WLR
  • Compatible with the Celadon Modular AdapterTM
  • Temperature compensated for use from-65°C to +300°C (options to 400°C)
  • fA level leakage measurements
  • Compatible with quick disconnect triaxial cable harnesses
  • Quasi-Kelvin connections available
  • Several Connector options Available


P/N Parametric Style Leakage Fempto Amps per Volt Settling time in seconds Settling Time Probe Replacement Probe Type Maximum Number of Probes Minimum Sustained Operating Temperature Maximum Sustained Operating Temperature Ownership Cost Suggested Cable/Connector Method Recommended Prober Size Typical Applications
T200LL Low Leakage 5 fA/V 10 Fast Requires Factory Trained Person with Aligner Single Conductor 2500 -65°C 300°C Low Triax 200 mm and Above Wafer Level Reliability (WLR), Hot Carriers (HCI), Negative Bias Temperature Instability (NBTI), Time Dependent Dielectric Breakdown (TDDB), Bias Temperature Stress (BTS)
T200HT Functional Test and High Temperature Test Less than one 1 pA/V 10 Not specified Requires Factory Trained Person with Aligner Single Conductor 2500 -65°C 300°C Low Coax, Single Conductor, Ribbon or Plain Wire 200 mm and Above Functional Test, High Temperature Test, Wafer Level Reliability (WLR), Electromigration (EM) Wafer level burn in.

  • Mounting Method: Celadon Modular AdapterTM
  • Temperature Compensated: Yes
  • Supports Multi-Site Probing: Yes
  • Maximum Coverage Area: Round 180 mm Diameter
  • Crash Resistance: Rigid and Fault Tolerant, Slots protect probe from Damage
  • Probe Self Alignment Slots: Yes - cavity captured
  • Die to Die Pitch: Depends on Design call for details

Probe Station
  • Requires properly configured Probe Station.
  • Compatible with many popular models.
  • Contact Celadon for additional information
  • The microscope needs to move across the wafer while the wafer chuck remains stationary or an upward looking stage mounted camera with probe to pad alignment needs to be used.
  • High Z force chucks may be required- dependent on number of probes.
  • Chuck needs to be well planarized and flat.

Required Accessories
  • Celadon Modular AdapterTM
  • Establish web connection to this page
  • Touch Down Sensor Box
  • Accessory - establish web connection to this page.

Suggested Celadon Cables: CBL001-3m, CBL501-3m

Recommended Accessory: Octagon Light Tight Enclosure and Interface Panel, Accessory - establish web connection to this page.

Notes: This product is typically used with reliability systems from leading manufacturers and switching matrices connected to parameter analyzers.