T72 Multi-Site Probe Card

The 72 mm tile was designed for mounting on a standard 4.5” Probe card holder. The 1.6 mm (0.062") thick rails allow the chassis to slip into planarity adjustable probe card holders for most analytical probe stations. High temperature cables (Low noise coax on the T72LL) are compatible with -65 to 300°C continuous operation. The connection to triaxial cable harnesses is made through connectors mounted away from the hot wafer chuck area. Celadon has designed cable interface kits that are directly compatible with a variety of commercially available test systems and probe stations.

72 Millimeter Ceramic Tile Multi-Site Site Probe Cards

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  • Optimized for Multi-Site DC parametric test and Multi-Site WLR
  • Compatible with standard 4.5” rectangular edge card holders
  • Temperature compensated for use from-65°C to +300°C
  • fA level leakage measurements
  • Compatible with quick disconnect triaxial cable harnesses
  • Quasi-Kelvin connections available
  • Several Connector options Available



P/N Parametric Style Leakage Fempto Amps per Volt Settling time in seconds Settling Time Probe Replacement Probe Type Maximum Number of Probes Minimum Sustained Operating Temperature Maximum Sustained Operating Temperature Ownership Cost Suggested Cable/Connector Method Recommended Prober Size Typical Applications
T72LL Low Leakage 5 fA/V 10 Fast Requires Factory Trained Person with Aligner Single Conductor 160 -65°C 300°C Low Triax 150 mm and Above Modeling, Device Characterization, Wafer Level Reliability (WLR), Hot Carriers (HCI), Negative Bias Temperature Instability (NBTI), Time Dependent Dielectric Breakdown (TDDB), Bias Temperature Stress (BTS)
T72HT Functional Test and High Temperature Test Less than one 1 pA/V 10 Not specified Requires Factory Trained Person with Aligner Single Conductor 160 -65°C 300°C Low Coax, Single Conductor, Ribbon or Plain Wire 150 mm and Above Functional Test, High Temperature Test, Wafer Level Reliability (WLR), Electromigration (EM)
T72SP RF and High Gain Devices Less than one 1 pA/V n/a Not specified Requires Factory Trained Person with Aligner Single Conductor Depends on Layout -65°C 300°C Low Mezzine Board, impedence matched traces, decoupling resistor/capacitors 75 mm and Above Modeling, Device Characterization, Wafer Level Reliability (WLR) of compound semiconductors.

 

  • Mounting Method: 4.5" Probe Card Holder with Planarity Adjust
  • Temperature Compensated? YES
  • Supports Multi-Site Probing: YES
  • Maximum Coverage Area: 72 mm x 72 mm
  • Crash Resistance: Rigid and Fault Tolerant, Slots protect probe from Damage
  • Probe Self Alignment Slots: Yes - cavity captured
  • Die to Die Pitch: Depends on Design call for details

 

Celadon T72 Series Probe Cards Datasheet