Celadon Systems, Inc.

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MiniTile™ Probe

Celadon has reduced the size of a probe card down so that it will fit on a conventional 3-hole mount probe positioner. You can switch from RF to DC test using the same probe holder, which minimizes switchover time. This allows end users to eliminate the need to break down RF setups to do high performance dc characterization with a design does not compromise performance. With a positioner that can handle the heat, stable probing at +500C is possible on entire test patterns for low level DC characterization. This is also a great solution for 4-site wafer level reliability. The product can be built with offset probes so that two probes can be with 16 mm of each other. On magnetic stands, the positioner can be readily moved to accommodate changes in wafer die pitch. Positioners from prober manufacturers are available with X, Y, Z and theta adjust. Multi-Site adjustable pitch WLR is now a reality at an affordable price. This product can also be used for extreme temperatures, used in combination with RF probes or for precision modeling capability. The design goal was to keep the width of the positioner to be as small as possible at the back to eliminate problems with typical fan out blade card designs. AttofastTM options are available. The AttoFastTM design extends lengths of the probe.





MiniTile ProbeTM
with angled body
  • Optimized for DC parametric test and single site WLR
  • Compatible with Rigid Celadon Qualified RF Probe Holders
  • Temperature compensated for use from-65°C to +300°C
  • fA level leakage measurements
  • Compatible with quick disconnect triaxial cable harnesses
  • Quasi-Kelvin connections available
  • AttoFastTM Fast Settling probes Available
  • Several Connector options Available
  • Bypass Capacitors Available on MiniTile Probe TM "Compatible with Rigid Celadon Qualified RF
  • Probe Holders" should be "Requires Planarizing Positioner with 3 hole or RF Probe Mount"
  • Angled MiniTile ProbeTM Version required for use in Quadrant Applications with RF Probes


P/N Parametric Style Leakage Fempto Amps per Volt Settling time in seconds Settling Time Pin to pin Leakage in Fempto Amps per volt Probe Replacement Probe Type Maximum Number of Probes Minimum Sustained Operating Temperature Maximum Sustained Operating Temperature Ownership Cost Suggested Cable/Connector Method Recommended Prober Size Typical Applications
TMAF AttoFastTM 2 fA/V 1 Ultra Fast 1 at 1 second Requires Factory Trained Person with Aligner Coax - two conductor 6 -65°C 300°C Medium Triax 150 mm and Above Modeling, Device Characterization, Applications for fast wafer stepping to collect high accuracy data
TMLL Low Leakage 50 fA/V 10 Fast 5 at 10 seconds Requires Factory Trained Person with Aligner Single Conductor 12 -65°C 300°C Low Triax 150 mm and Above Modeling, Device Characterization
TMHT Functional Test and High Temperature Test Less than one 1 pA/V 10 Not specified Not Specified Requires Factory Trained Person with Aligner Single Conductor 12 -65°C 300°C Low Coax, Single Conductor, Ribbon or Plain Wire 150 mm and Above Functional Test, High Temperature Test

  • Mounting Method: RF Probe Positioner/Manipulator/Probe Head
  • Temperature Compensated: Yes
  • Supports Multi-Site Probing: Yes, mounting hardware dependent
  • Maximum Coverage Area: Not Applicable
  • Crash Resistance: Rigid and Fault Tolerant, Slots protect probe from Damage, Vertical overtravel travel protection
  • Probe Self Alignment Slots: Yes - cavity captured
  • Die to Die Pitch: Does not apply